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12-inch wafer compatible type CVmap3093 A/B

12-inch wafer compatible type

This is a CV/IV measurement system using a mercury probe method that excels in reproducibility and safety. It can measure the characteristics of various types of wafers, including Si, compounds, SOI, SiC, and bulk wafers. Users can specify up to 49 measurement sites, enabling mapping measurements of C-V, I-V characteristics, TDDB, Vbd, Qbd oxide breakdown evaluation, Dit, doping concentration, oxide film thickness, Low-k, High-k, and more.

  • Other environmental analysis equipment

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